JPH0229527U - - Google Patents

Info

Publication number
JPH0229527U
JPH0229527U JP10811788U JP10811788U JPH0229527U JP H0229527 U JPH0229527 U JP H0229527U JP 10811788 U JP10811788 U JP 10811788U JP 10811788 U JP10811788 U JP 10811788U JP H0229527 U JPH0229527 U JP H0229527U
Authority
JP
Japan
Prior art keywords
loop
shaped conveyor
thin film
substrates
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10811788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648846Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988108117U priority Critical patent/JPH0648846Y2/ja
Publication of JPH0229527U publication Critical patent/JPH0229527U/ja
Application granted granted Critical
Publication of JPH0648846Y2 publication Critical patent/JPH0648846Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Multi-Process Working Machines And Systems (AREA)
JP1988108117U 1988-08-17 1988-08-17 薄膜デバイスの製造設備 Expired - Lifetime JPH0648846Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988108117U JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988108117U JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Publications (2)

Publication Number Publication Date
JPH0229527U true JPH0229527U (en]) 1990-02-26
JPH0648846Y2 JPH0648846Y2 (ja) 1994-12-12

Family

ID=31343150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988108117U Expired - Lifetime JPH0648846Y2 (ja) 1988-08-17 1988-08-17 薄膜デバイスの製造設備

Country Status (1)

Country Link
JP (1) JPH0648846Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005175455A (ja) * 1993-07-15 2005-06-30 Renesas Technology Corp 製造システムおよび製造方法
JP4816641B2 (ja) * 2005-07-04 2011-11-16 株式会社村田製作所 チップ型電子部品の電極形成システムおよび電極形成方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56169343A (en) * 1980-05-30 1981-12-26 Fujitsu Ltd Manufacture of semiconductor device
JPS5733952A (en) * 1980-08-11 1982-02-24 Nissan Motor Co Ltd Automatic conveyor of work
JPS63105877A (ja) * 1986-10-24 1988-05-11 Hitachi Ltd ワ−クの搬送装置
JPS63120061A (ja) * 1986-11-07 1988-05-24 Hitachi Ltd 無人搬送車への作業割付制御方式

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56169343A (en) * 1980-05-30 1981-12-26 Fujitsu Ltd Manufacture of semiconductor device
JPS5733952A (en) * 1980-08-11 1982-02-24 Nissan Motor Co Ltd Automatic conveyor of work
JPS63105877A (ja) * 1986-10-24 1988-05-11 Hitachi Ltd ワ−クの搬送装置
JPS63120061A (ja) * 1986-11-07 1988-05-24 Hitachi Ltd 無人搬送車への作業割付制御方式

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005175455A (ja) * 1993-07-15 2005-06-30 Renesas Technology Corp 製造システムおよび製造方法
JP4816641B2 (ja) * 2005-07-04 2011-11-16 株式会社村田製作所 チップ型電子部品の電極形成システムおよび電極形成方法

Also Published As

Publication number Publication date
JPH0648846Y2 (ja) 1994-12-12

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